Mirror`s imaging characteristics variation device for projection exposure system, has actuators formed such that changeable forces are introduced in mirror by variation in temperature, where forces lead to deformation of mirror surface

摘要

The device has a set of actuators (13) that are provided on a rear side of a zerodur-mirror (12), where a surface of the mirror is changeable by activation of the actuators. The actuators are formed such that selective changeable forces and/or moments are introduced in the mirror by variation in temperature of the actuators, where the forces lead to a deformation of the mirror surface.