Mirror`s image characteristics variation device, has bar or rod-shaped units variable in their length independent of each other during activation of actuators, such that changes lead to local deformations on mirror surface

摘要

The device has actuators (24) provided at a rear side of a mirror, and bar or rod-shaped units (12-23) that are provided at the rear side, where the actuators act on the units. The units are variable in their length independent of each other during the activation of the actuators, such that the changes lead to local deformations on the mirror surface. The units are formed from the material of the mirror by a deformation procedure. An independent claim is also included for a projection objective comprising a mirror.