Optical device for homogenization of laser radiation, has homogenizing module, which divides laser radiation in incoherent partial radiation lateral to each other

摘要

The optical device has a homogenizing module (2) which divides laser radiation (P1) in incoherent partial radiation lateral to each other. The multiple optics elements are arranged next to each other, which in each case focus each partial radiation of the other laser radiation bundle (P3) in a position corresponding to direction of propagation of the partial radiation in a pupil level of another homogenizing module (3). The homogeneous illuminated pupil is transformable with an optics unit of the other homogenizing module into the field level of the other homogenizing module. An independent claim is also included for an optical method for homogenization of laser radiation.