An optical lens, a beam homogenizer, laser irradiation apparatus and a laser irradiation method

摘要

PROBLEM TO BE SOLVED: To enable satisfactory and uniform laser annealing to the whole surface of film by forming an optical lens with a lens obtained by cutting a cylindrical lens at the basic plane. ;SOLUTION: An optical lens 903 for dividing a laser beam in the width direction is formed of lenses obtained by cutting each cylindrical lens of the cylindrical lens group at the basic plane. The half-cylindrical lenses are arranged in several stages in the same direction. This structure is called a half-cylindrical lens group. Since the optical lens 903 is structured as explained above, the laser beam radiated to an edge 910 of a substrate 909 through the light path indicated with a thick line passes the basic line in the optical lens 903 and almost does not receive aberration of optical lens 903. The optical lens 903 is formed of half-cylindrical lens which is obtained by cutting the flat-projected cylindrical lens at the basic plane.;COPYRIGHT: (C)2001,JPO