Vacuum sputtering plant with magnetrons, for coating both sides of flat glass, employs identical attachments for both upper and lower coating units

摘要

Attachments (9) for the upper sputtering unit, which coats the top of the glass, have the same length as those (9) holding the sputtering unit (7) coating the underside of the glass. A spacer (12) is located between the cover (4) and the opening (5) of the vacuum coating chamber, in the installation of magnetrons (8) which coat the upper side of the glass. The spacer height compensates for the length of attachments used to position magnetrons for coating the underside of the glass. The attachments (9) of the sputtering units are identical, whether used for coating upper or lower surfaces of the glass. Either the spacer has flanges at each end, or the spacer and cover are connected together as a single piece. The spacer flange (14) facing the vacuum chamber opening (5), the cover flange and the vacuum chamber opening, all have sealing surfaces with identical conditions of connection.