Micromechanical combination unit for use in mobile telephone position-dependent display control, has inertia type and diaphragm type sensor devices formed on front side of substrate, where diaphragm type sensor device has diaphragm

摘要

The unit has inertia type and diaphragm type sensor devices formed on a front side (VS) of a substrate (1), where the diaphragm type sensor device has a diaphragm and a counter electrode, and the inertia type sensor device has a bending bar. The sensor devices are cut by a common cutting device e.g. cup wafer. The diaphragm type sensor device is pressurized by a cavern. An independent claim is also included for a manufacturing method for a micromechanical combination unit.