Rotation symmetric part`s form deviation and ripple determining method, involves conducting high pass filtering of measurement curve of reflection signal, where curve shows form deviation of testing part

摘要

The method involves detecting reflected measuring light and conducting low pass filtering of measured values to determine reflection radiation deflection. Interpolation of the measured value is conducted such that an eccentric inclination angle displacement is added to angle grade widths and is interpolated with an angle raster. A measurement curve of Fourier analysis is subordinated and high pass filtering of the measurement curve of a reflection signal is conducted, where the measurement curve shows form deviation of a testing part. An independent claim is also included for a device for determining form deviation and ripple of a rotation symmetric part.