Laser - scanning - microscope with main beam splitter to the spatial separation of the lighting - and detection of radiation

摘要

It is provided a laser - scanning - microscope with an illumination beam source (5) and a detection beam path (2), which in a sample is excited (3) and / or backscattered radiation along an optical axis (oa) to a detector device (4) is conductive and in which a beam splitter (13) is provided, by way of the illumination beam source (5) the illuminating radiation is emitted in an illumination beam path (b) to the sample (3) is directed, wherein the beam splitter (13) on the sample (3) specularly reflected light radiation is not used for detecting means (4) pass and for this purpose, in a pupil of the illumination beam path (b) is arranged as well as partially mirrored, wherein the beam splitter (13) a in the detection beam path (2) has the beam splitter surface (22) which, at least at three points (23a - d) of the illumination radiation is provided with a reflective coating, which on the beam splitter surface (22) on a circle around the point of penetration (25) of the optical axis (oa), and of the illumination beam source (5) one of the number of points corresponding number of partial beams (sa - d) is generated, and this to the three points (23a - d) of the beam splitter (13) is focused in such a way that, in the sample (3) an interference pattern (28) in the form of periodically over the sample (3) distributed illumination spots (26) is produced.