Facet mirror e.g. field facet mirror, for projection illumination system, has mirror segments provided with reflective surfaces, arranged on mirror carrier, and formed with individually formed angle of inclination in two different planes

摘要

The mirror has mirror segments (11) provided with reflective surfaces (13) and arranged on a mirror carrier (9). A portion of the mirror segments comprises an aspect ratio of greater than 1:5, and is formed identically. The portion of the mirror segments is received individually in holdings (10). The holdings are mounted on the mirror carrier, where the mirror segments are formed from strips which are provided on a longitudinal side with the reflective surfaces. The segments are formed with individually formed angle of inclination in two different planes.