Measurement rod holding method, involves creating electrical voltage between electrodes of measurement rod and carrier, and forming difference of potential between rod and carrier to generate holding force for electrostatic clamp

摘要

The method involves holding a measurement rod (1) having a measuring divider (15) at a carrier (2), by using an electrostatic clamp. A fluid film e.g. oil film, is arranged between the rod and the carrier. An electrical voltage (U) is created between an electrode (212) of the measurement rod and an electrode (211) of the carrier. A difference of potential between the rod and the carrier is formed to generate a holding force for the clamp, where the holding force of the clamp varies in a location dependent manner. An independent claim is also included for an arrangement with a carrier and a measuring rod with a measuring divider.