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Sensor module has control circuit arranged as integrated circuit on substrate, and sensor module has two sensor elements, and one of sensor elements is micro-electromechanical sensor made of silicon wafer
Sensor module has control circuit arranged as integrated circuit on substrate, and sensor module has two sensor elements, and one of sensor elements is micro-electromechanical sensor made of silicon wafer
The module has a control circuit arranged as integrated circuit on a substrate, and the sensor module has two sensor elements. One of the sensor elements is a micro-electromechanical sensor made of a silicon wafer. The sensor module is designed as surface-mountable construction unit as plated through construction unit.
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