Capacitive measurement device for e.g. dimensional metrology system, has integrated circuit surrounded by guard to which guard electrode of sensor module is connected, where guard electrode is arranged near target electrode

摘要

The device (1.1) has a sensor module (2.1) with a measuring electrode (200) and a guard electrode (201) arranged near a target electrode (7) connected to a general earth connection (M). An integrated circuit (3) for capacitive measurement is surrounded by a guard (25) to which the electrode (201) is connected. The circuit has an input connected to the electrode (200), a reference earth connection connected to the guard, an excitation output (OSC) connected to the connection (M) and a measuring output (S). A direct current-direct current converter (5) supplies, in floating mode, the circuit. An independent claim is also included for a capacitive measurement method.