PRELIMINARY IONIZATION ELECTRODE, GAS LASER APPARATUS EQUIPPED WITH THE ELECTRODE, AND LASER PROCESSING APPARATUS EQUIPPED WITH THE GAS LASER APPARATUS

摘要

PROBLEM TO BE SOLVED: To achieve stable discharging having better efficiency by accelerating the timing of a start of preliminary ionization and increasing preliminary ionization strength.;SOLUTION: A preliminary ionization electrode is provided with a hollow insulating tube and a wire electrode disposed in the insulating tube, and generates discharging by applying a high voltage pulse to the wire electrode and generates preliminary ionization in a main discharging space. In the preliminary ionization electrode, an insulating layer formed of an insulating material different from that of the insulating material of the insulating tube and having a dielectric ratio and high electron radiation performance is formed by frame spraying on the surface of the insulating tube, and the shaft of the insulating tube having the insulating layer formed therein is provided on the side of the main discharging space so as to extend in the longitudinal direction of the main discharging electrode. Thus, the problem is solved.;COPYRIGHT: (C)2008,JPO&INPIT