METHOD OF DETECTING OUT-OF-ELECTRODE DISCHARGE IN GAS LASER OSCILLATOR AND GAS LASER OSCILLATOR EQUIPPED WITH OUT-OF-ELECTRODE DISCHARGE DETECTING MEANS

摘要

PROBLEM TO BE SOLVED: To provide a new method of detecting out-of-electrode discharge in which no out-of-electrode discharge detecting means is not provided in a laser oscillator, and to provide a gas laser oscillator equipped with an out-of- electrode discharge detecting means.;SOLUTION: The gas laser oscillator is provided with a discharge section constituted by connecting a high voltage-side electrode 9 and a low voltage-side electrode 11 to a high-frequency power source 5 in a vacuum vessel 3 filled up with a laser gas G. The vessel 3 is grounded and, at the same time, connected to the ground of the power source 5 through conductors 13. Out-of- discharge is detected by detecting the currents which flow through the conductors 13 when out-of-discharge occurs by means of a current measuring means 15.;COPYRIGHT: (C)2003,JPO