NON-UNIDIRECTIONAL AIRFLOW TYPE CLEAN ROOM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a non-unidirectional airflow type clean room device ensuring cleanliness of a work area with the small number of times of return air and reducing the temperature difference of the work area.;SOLUTION: The non-unidirectional airflow type clean room device 1 keeping the inside of a clean room 10 clean by supplying clean air SA into the clean room 10 and diluting it has air supply ports 15 for horizontally supplying the clean air SA filtered by a high efficiency filter 33 and lower in temperature than an indoor temperature, toward the work area 11, and exhaust ports 16 for exhausting air in the clean room 10 above the work area 11. The clean air SA is supplied from the air supply ports 15 so that the average flow velocity at a discharge surface into the room is ≥0.5 m/s and ≤1.2 m/s. This clean room device 1 can dilute and keep clean only the work area 11 formed at the lower part of the clean room 10.;COPYRIGHT: (C)2008,JPO&INPIT