Evaluation of Adaptability on Induction Type Displacement Ventilation System to Non-unidirectional Airflow Type Cleanroom

摘要

It is effective for energy saving at the non-unidirectional airflow type clean room to reduce an air change rate. When an air change rate is reduced at the conventional non-unidirectional airflow type clean room, we are anxious about increasing of particles and temperature difference at the occupied zone. To reduce particles, we consider carrying the particles towards the ceiling by thermal plumes. Furthermore, we consider moving air only occupied zone by entrainment force of diffusers without mixing of whole space at clean room to reduce temperature difference at the occupied zone. In this paper, we reported the performance data of operational clean room with SWIT system, which used the compact air supply units with high induction rate near by the supply surface by multiple swirling combination airflow. As results, SWIT could keep a half number of particles in the occupied zone than return air. And induction of supply unit is necessary to prevent high-concentration stay area in the occupied zone. As results of the estimation, there were suggested that SWIT was able to reduce 23 percent of annual energy consumption as compared with the mixing system for this cleanroom, since SWIT could reduce supply air volume in a half.