CALIBRATION METHOD FOR THREE-DIMENSIONAL SHAPE MEASURING INSTRUMENT, AND THREE-DIMENSIONAL SHAPE MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a calibration method for a three-dimensional shape measuring instrument not requiring an expression of a slit plane, and capable of dispensing thereby with a setting preparation of requiring precision, even in calibration, to be easily carried out, and to provide a three-dimensional shape measuring method using the same.;SOLUTION: This calibration method for the three-dimensional shape measuring instrument has: the first step for imaging a state projected with a slit pattern on a plurality of parallel planes with a known interplane distance and different distances from an imaging part; the second step for calculating a parameter of an expression expressing a position and a shape of an image of the slit pattern in every of the planes; and the third step for storing the parameter in every slit while correlating the image of the slit pattern with height coordinates of the observed plane.;COPYRIGHT: (C)2008,JPO&INPIT