FORMING DEVICE OF TRANSPARENT CONDUCTIVE FILM ONTO FLEXIBLE SUBSTRATE, MASK MEMBER, AND TRANSPARENT CONDUCTIVE FILM RESIN SUBSTRATE FOR ORGANIC ELECTROLUMINESCENT ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a transparent conductive film forming device having a high quality, high productivity, and capable of cost reduction by continuously performing a pattern forming of a transparent conductive film on a flexible resin substrate as a forming method of a mask patterning of the transparent conductive pattern is provided in the long flexible resin substrate, and provide a mask member used for the same, and a transparent conductive film resin substrate for an organic EL manufactured by this forming device.;SOLUTION: This is the forming device of a transparent conductive film to form the transparent conductive film on a long flexible resin substrate which is continuously transferred in a vacuum tank 1. While moving a mask member for pattern forming closely in contact and synchronized with the flexible resin substrate during transfer of the flexible resin substrate 2, pattern forming is carried out by using a thin-film forming means in the closely contacted zone with the mask member M.;COPYRIGHT: (C)2008,JPO&INPIT