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MULTIFILM STRUCTURE, SURFACE-EMITTING LASER COMPOSED OF MULTIFILM STRUCTURE, AND MANUFACTURING METHOD THEREFOR
MULTIFILM STRUCTURE, SURFACE-EMITTING LASER COMPOSED OF MULTIFILM STRUCTURE, AND MANUFACTURING METHOD THEREFOR
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机译:多层膜结构,由多层膜结构构成的表面发光激光器及其制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a multifilm structure in which a refraction factor difference between a photonic crystal layer and a clad layer adjacent thereto can be determined to be a sufficient difference and the electrical resistance of the clad layer can be reduced, and to provide a surface-emitting laser composed of the multifilm structure and a manufacturing method for the surface-emitting laser.;SOLUTION: The multifilm structure includes the secondary photonic crystal layer 106 and the clad layer 105 adjacent thereto, and the surface-emitting laser is composed of the multifilm structure. The clad layer 105 has a refraction factor lower than that of the secondary photonic crystal layer 106, and pores are formed on part or the whole of the clad layer 105.;COPYRIGHT: (C)2008,JPO&INPIT
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