MANUFACTURING METHOD OF PIEZOELECTRIC BIMORPH ELEMENT, AND PIEZOELECTRIC BIMORPH ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric bimorph element and the piezoelectric bimorph element in which manufacturing is facilitated even when a width is made narrow, and a short-circuiting defect between electrodes does not occur, either.;SOLUTION: The present invention relates to a method of manufacturing a cantilever beam-type piezoelectric birmoph element in which a plurality of rectangular piezoelectric elements are stacked via electrodes, including the steps of: stacking a plurality of piezoelectric elements in such a way that a first exposed terminal of an electrode to which a voltage of a first potential is applied during polarization, is exposed on a first longer lateral side of a piezoelectric element, a second exposed terminal of an electrode to which a voltage of a second potential is applied during polarization, is exposed on a second longer lateral side of the piezoelectric element, and a third exposed terminal of an electrode to which a voltage of a third potential is applied during polarization, is exposed at a position deviated from the second exposed terminal on the second longer lateral side of a piezoelectric element; and polarizing the piezoelectric elements by applying the voltages of the first to third potentials, respectively, to the electrodes via the first to third exposed terminals.;COPYRIGHT: (C)2008,JPO&INPIT