PRESSURE ROLLER FOR APPLYING POLISHING PAD AND APPLYING METHOD OF POLISHING PAD WITH PRESSURE ROLLER IN DOUBLE-SIDED POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To obtain a new technical means capable of mechanically applying a polishing pad to upper and lower surface plates in a double-sided polishing device by using a pressure roller, with a simple structure and an easy operation.;SOLUTION: Roller bodies 21 of a plurality of pressure rollers 20C individually detachable from / attachable to a polishing device are formed shorter than widths of pad applying surfaces 1a, 2a of upper and lower surface plates 1 and 2. When a polishing pad 5 is applied to the pad applying surfaces 1a, 2a, the upper and lower surface plates 1 and 2 are rotated reversely with the roller bodies 21 interposed between the upper and lower surface plates 1 and 2, thereby rotating the roller bodies 21 so as to follow the upper and lower surface plates 1 and 2 to move the surface plates 1 and 2 in a radius direction, thus attaching the polishing pad 5 to the pad applying surfaces 1a and 2a by pressure.;COPYRIGHT: (C)2008,JPO&INPIT