METHOD FOR PRODUCING A-SITE LAYERED ORDERED PEROVSKITE Mn OXIDE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a production method which enables to form a thin film of a crystallized A-site ordered perovskite Mn oxide on a substrate.;SOLUTION: In a method for forming on a substrate a thin film comprising an A-site layered ordered perovskite manganese oxide of composition formula: RBaMn₂O_6-d (an R ion and a Ba ion occupy the A site of a perovskite structure (AMnO₃ structure)) in which the A site has a crystal structure with an alternating ordered array in layers (wherein R is a trivalent ion of at least one selected from Y, La, Pr, Nd, Sm, Eu, Gd, Dy, Tb and Ho; Ba may be partly substituted by Ca or Sr; and the Mn site may be substituted by an extremely small amount of a metal ion such as Cr or Ru), an organic metal thin film containing the constituent elements of the above material is made amorphous by pyrolysis, held at 500-800°C in an inert gas, and crystallized by irradiation with ultraviolet laser. A method for producing an A-site layered ordered perovskite manganese oxide thin film is provided.;COPYRIGHT: (C)2008,JPO&INPIT