LASER ABLATION DEVICE AND LASER ABLATION AMOUNT CALCULATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser ablation device and laser ablation amount calculating method, which determines the laser ablation amount of a sample.;SOLUTION: In the laser ablation device 2, when the laser ablation for the sample S is started, an arithmetic section 50 subtracts the energy of the laser beam measured by photodetectors 43 and 44 from the energy of the laser beam measured by a photodetector 45, and calculates the energy of the laser beam absorbed by the sample S of the laser beams radiated to the sample S. The arithmetic section 50 calculates the laser ablation amount of the sample S from the energy of the laser, beam based on the information about the correlation between the energy of the laser beam absorbed by the sample S and the laser ablation amount of the sample S.;COPYRIGHT: (C)2008,JPO&INPIT