QUANTITATIVE DETERMINATION METHOD FOR SULFONIC ACID TYPE ANIONIC SURFACTANT IN COPPER ELECTROLYTE OR PLATING LIQUID

摘要

PPROBLEM TO BE SOLVED: To provide a quantitative determination method of satisfactory reproducibility for a sulfonic acid type anionic surfactant in a copper electrolyte or a plating solution, capable of reducing an error. PSOLUTION: Ammonia is made to act on 25-250 ml of copper electrolyte or plating solution as a complexing agent to bring a treating solution into 8-13 of pH, a temperature of the solution is maintained at 30C, preferably 10-30C, in reaction, and a heavy metal ion contained in the copper electrolyte or plating solution is thereby changed into an amine complex to obtain the adjusted treating solution. The heavy metal ion contained in the copper electrolyte or plating solution is prevented by this manner from acting as disturbance when forming a methylene blue complex. PCOPYRIGHT: (C)2008,JPO&INPIT