TIN OXIDE FILM FORMER, TIN OXIDE FILM FORMATION METHOD USING IT, AND TIN OXIDE FILM FORMED BY IT

摘要

PROBLEM TO BE SOLVED: To provide a tin oxide film former capable of forming a tin oxide film at low temperatures.;SOLUTION: This tin oxide film former contains at least one kind out of organic tin compounds comprising: (1) a compound formed of one tin atom bonded to (p) organic groups each having a double bond at the β-position (when p is 2-4, the organic groups are identical or different from one another), any one kind within (m) halogen atoms, hydroxyl groups, alkoxy groups and acyloxy groups, and any one kind within (n) halogen atoms, hydroxyl groups, alkoxy groups and acyloxy groups (p is an integer of 1-4, m and n are each an integer of 0-3, and p+m+n=4); (2) a compound formed of one tin atom bonded to two organic groups each having a double bond at the β-position, and an oxygen atom bonded by one double bond; and (3) a compound formed of one tin atom bonded to one organic group having a double bond at the β-position, an oxygen atom bonded by one double bond, and one hydroxyl group; wherein the organic groups in (1), (2) and (3) are identical or different from one another.;COPYRIGHT: (C)2008,JPO&INPIT