MICROSWITCHING ELEMENT AND MICROSWITCHING ELEMENT MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a microswitching element suitable for suppressing orientation variations of a movable contact electrode to a fixed contact electrode, and a manufacturing method of the microswitching element.;SOLUTION: The element X1 is provided with a fixed part 11, a movable part 12, an electrode 13 having contact parts 13a', 13b', an electrode 14A having a contact part 14a to contact the contact part 13a', and an electrode 14B having a contact part 14b' to be opposed to the contact part 13b'. The manufacturing method comprises a process to form the electrode 13 on a substrate, a process to form a sacrifice layer on the substrate so as to cover the electrode 13, a process to form a first recessed part and a second recessed part shallower than this at the positions corresponding to the electrode 13 in the sacrifice layer, a process to form the electrode 14A to fill the first recessed part having a portion to be opposed to the electrode 13 through the sacrifice layer, and a process to form an electrode 14B to fill the second recessed part having a portion to be opposed to the electrode 13 through the sacrifice layer, and a process to remove the sacrifice layer.;COPYRIGHT: (C)2008,JPO&INPIT