APPARATUS FOR CONSECUTIVELY FORMING FILM ON SUBSTRATE AND TRANSFERRING THE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a consecutive film formation and transfer apparatus for consecutively performing steps of attaching a mask, forming a film and then transferring the film-formed substrate.;SOLUTION: The consecutive film formation and transfer apparatus 1 comprises: a transfer belt 20 that has a plurality of mask holes 21 for film formation at a predetermined interval and has one surface on which substrates 10 are disposed; a film formation mechanism 30 disposed on a side opposite to one surface; and a motor 40 for moving the transfer belt 20. Each of the mask holes 21 has a smaller area than that of each of the substrates 10 so that the outer peripheral edge of each mask holes 21 on the transfer belt 20 overlaps the substrate 10. When any of the mask holes 21 is located on a predetermined position, the film formation mechanism 30 forms a film on the substrate 10 that is disposed on the any of the mask holes 21.;COPYRIGHT: (C)2008,JPO&INPIT