METHOD FOR MEASURING CAPACITY VALUE AND CAPACITY-VALUE MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring a capacity value and a capacity-value measuring instrument capable of stably computing the capacity value C of a gate insulating film with a high accuracy.;SOLUTION: The frequency dependency of a complex impedance Z having a MIS structure is measured, a peak height Rp/2 in the frequency dependency of an imaginary section (an inverted value) measured value-Im(Z) of the complex impedance Z is computed on the results of the measurement and the resistance value Rp of a parallel resistance is computed by using the results of the computation. The low-frequency measured value (Rp+Rs) of a real section Re(Z) of the complex impedance Z is computed on the basis of the results of the measurement, and the resistance value Rs of a series resistance is computed by using the results of the computation and the computed resistance value Rp. A frequency (f) in the case of Re(Z)= Rp/2+Rs is obtained on the basis of the results, and the capacity value C is computed by substituting the frequency (f) and the computed resistance value Rp for the relational expression of f(Re(Z)=Rp/2+Rs)=1/(2 πRpC).;COPYRIGHT: (C)2009,JPO&INPIT