MEASURING INSTRUMENT FOR MEASURING CAPACITY, AND METHOD FOR CALIBRATING TRANSPORT POSITION DATA IN PROCESSING SYSTEM BY USING MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To understand positional relationship of a focus ring and a measuring instrument.SOLUTION: A measuring instrument for measuring capacity is provided. The measuring instrument includes a base substrate having disk shape, multiple first sensors providing, respectively, with multiple side electrodes arranged along the edge of the base substrate, one or more second sensors each having a bottom electrode provided along the bottom face of the base substrate, and a circuit board. The circuit board is configured to give a high frequency signal to the multiple side electrodes and bottom electrode, to generate multiple first measured values representing a capacity from the respective voltage amplitudes in the multiple side electrodes, and to generate a second measured values representing a capacity from the voltage amplitude in the bottom electrode.SELECTED DRAWING: Figure 5