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MEASURING INSTRUMENT FOR MEASURING ELECTROSTATIC CAPACITY AND METHOD OF CALIBRATING TRANSFER POSITION DATA IN PROCESSING SYSTEM BY USING MEASURING INSTRUMENT
MEASURING INSTRUMENT FOR MEASURING ELECTROSTATIC CAPACITY AND METHOD OF CALIBRATING TRANSFER POSITION DATA IN PROCESSING SYSTEM BY USING MEASURING INSTRUMENT
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机译:用于测量静电容量的测量仪器以及使用该测量仪器校准处理系统中的传输位置数据的方法
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摘要
Provided is a measuring instrument for measuring an electrostatic capacity. The measuring instrument includes a base substrate having a disk shape, a plurality of first sensors arranged along an edge of the base substrate and respectively provide a plurality of side electrodes, one or more second sensors each of which has a bottom electrode provided along a bottom surface of the base substrate, and a circuit board. The circuit board is configured to apply a high frequency signal to the plurality of side electrodes and the bottom electrode, to generate a plurality of first measurement values respectively indicating electrostatic capacities based on voltage amplitudes in the plurality of side electrodes, and to generate a second measurement value indicating an electrostatic capacity based on a voltage amplitude in the bottom electrode.
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