RETICLE DEFECT INSPECTION DEVICE AND RETICLE DEFECT INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a reticle defect inspection device and a reticle defect inspection method, which suppresses damages on a reticle by irradiation with inspection light when a reticle is inspected in a still state.;SOLUTION: The reticle defect inspection device and the reticle inspection method aim to inspect a defect on a reticle by using a pattern image obtained by irradiating the reticle 101 having the pattern formed thereon with light, and are characterized in that the inspection device includes: a dose monitoring means 72 for measuring a dose of light on the reticle; a means 74 for calculating a cumulative dose from the dose measured by the dose monitoring means and comparing with a preliminarily determined threshold; and a means 76 for stopping irradiation of the reticle with light when the cumulative dose resulted from the comparison exceeds the threshold.;COPYRIGHT: (C)2009,JPO&INPIT