EVAPORATION TYPE GETTER MATERIAL, GETTER PUMP, DECOMPRESSION STRUCTURE, REACTION DEVICE, POWER GENERATION DEVICE AND ELECTRONIC APPARATUS

摘要

PPROBLEM TO BE SOLVED: To provide an evaporation type getter material capable of adsorbing gas by evaporating even at low temperatures; a getter pump, a decompression structure and a reaction device using it; and a power generation device and an electronic apparatus using them. PSOLUTION: An insulation film 3 is formed on a base material 2, and a temperature sensor and heater 8 is patterned in a meandering form on the insulation film 3. The temperature sensor and heater 8 has an adhesion layer 4, a diffusion prevention layer 5, an electric heating layer 6 and a diffusion prevention and adhesion layer 7 from the lowest layer, and the temperature sensor and heater 8 is covered with an interlayer insulation film 9. An evaporation type getter film 10 is formed on the interlayer insulation film 9, and the getter film 10 is formed of a single piece of samarium (Sm). PCOPYRIGHT: (C)2008,JPO&INPIT