VERTICAL-FURNACE SEMICONDUCTOR MANUFACTURING SYSTEM AND LOT-UNIT WAFER TRANSFER PROCESSING METHOD USING THE SAME

摘要

PPROBLEM TO BE SOLVED: To provide a vertical-reactor semiconductor manufacturing system that improves productivity, and to provide a lot-unit wafer transfer processing method that uses the same. PSOLUTION: A vertical-furnace semiconductor manufacturing system includes an operator interface server 10, which inputs process conditions, checks the presence or the absence of use of a monitor wafer, and generates the input number of lots and a "track-in" command; a host computer 14, which controls a process device by receiving a command from the operator interface server 10, collects data generated from the process device so as to provide them to the operator interface server 10, and controls in order to transfer wafer carriers in lots, before wafer carriers that correspond to one batch are all stored, when the "track-in" command is inputted from the operator interface server 10; and the process device 16 that transfers the wafer carriers in lots by a control command of the host computer 14 so as to store wafers in a wafer boat. PCOPYRIGHT: (C)2009,JPO&INPIT