MASK DRAWING DATA MANAGEMENT METHOD, MASK INSPECTION DATA MANAGEMENT METHOD AND MASK DRAWING DATA MANAGEMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To ensure the security property of mask drawing data.;SOLUTION: Encrypted mask drawing data is transmitted to a line device 21 of a receiver 20, and the mask drawing data is stored in a management server 22 of the receiver 20. Next, the stored mask drawing data is moved and transferred to an operation memory 23a of a pattern forming device 23 of the receiver 20 while decrypted, transferred to an operation processing part and transferred to a signal processing part. The mask drawing data remaining in the operation memory 23a is eliminated by being overwritten by empty data stored in the management server 22 of the receiver. According to such a method, the decrypted mask drawing data is prevented from remaining in the management server 22 and the operation memory 23a. Then, it is possible to ensure the security property.;COPYRIGHT: (C)2008,JPO&INPIT