PROBLEM TO BE SOLVED: To provide a composite piping capable of suppressing a change in temperature of a liquid due to a change in piping length in moving and suppressing generation of dust due to fluttering or bulging, and to provide an application/development processing apparatus equipped with the composite piping.;SOLUTION: The composite piping 60 has a configuration in which a plurality of pipe bodies 61, 62 including at least pipes 61 for liquid and pipes 62 for electric wiring are fixed in parallel, their one ends are connected to a piping connection block of a stationary facility side, and the other ends are connected to a nozzle head of a mover side. In the piping 60, the pipe bodies 61, 62 are integrally connected using a flexible covering member 63, a liquid supply pipe 64 is inserted with a space into the each of liquid pipes 61, and a temperature-adjusting liquid 65 so that it can be interposed in a space portion 68a between the liquid pipe body 61 and the liquid supply pipe 64.;COPYRIGHT: (C)2008,JPO&INPIT
展开▼
