METHOD OF MANUFACTURING HIGH DENSITY AlN-SiC-MeB COMBINED SINTERED COMPACT

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing high density AlN-SiC-MeB combined sintered compact by which sintering is carried out by about 200°C lowered temperature to reduce the manufacture cost and to easily use hot pressing (HP) or spark plasma sintering (SPS) which is a high degree sintering apparatus to be industrially manufactured and to improve economical effect though a conventional method of manufacturing AlN, SiC, metal borate combined ceramic requires high temperature sintering to make the industrial manufacture difficult.;SOLUTION: A composition or compound containing B and C or Al, B and C (AlBC-based sintering aid) is effective for the sintering of combined ceramic of AlN, SiC and metal borate to remarkably lower the sintering temperature. The addition of the AlBC-based sintering aid in this way is sufficiently densifying at 2,000°C and when using the HP or SPS sintering method, the sintering can be carried out at 1,850°C though sintering temperature requires ≥2,000°C when the sintering aid is not used.;COPYRIGHT: (C)2008,JPO&INPIT