Seed crystal and seed crystal holder for high quality growth of large-sized silicon carbide monocrystal

摘要

The silicon carbide seed crystal sublimation growth system and related method are disclosed. The system of this invention, in the crucible and the crucible the silicon carbide source composition, in order in the crucible to promote the steam transport with silicon carbide seed crystal, the raw materials composition and seed crystal on the seed crystal holder and the seed crystal holder, demarcates main growth direction with the raw materials composition and seed crystal, way the macroscopic growth surface of expedient, and the seed crystal which generate main temperature gradient in the crucible, angle of approximately 70 degree - 89.5 degrees is formed vis-a-vis main temperature gradient and main growth direction, at the same time, the seed crystal which possesses c axis of crystalIn order crystallography orientation, main temperature gradient to form the angle of approximately 0 degree - 2 times, the fact that seed crystal is arranged on the seed crystal holder is included.