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DISCHARGE ELEMENT, ELECTRIC DISCHARGE MODULE USING THE DISCHARGE ELEMENT AND OZONE GENERATING DEVICE AND ION GENERATING DEVICE USING THE ELECTRIC DISCHARGE MODULE
DISCHARGE ELEMENT, ELECTRIC DISCHARGE MODULE USING THE DISCHARGE ELEMENT AND OZONE GENERATING DEVICE AND ION GENERATING DEVICE USING THE ELECTRIC DISCHARGE MODULE
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机译:放电元件,使用该放电元件和臭氧发生装置的放电模块,以及使用该放电模块的离子发生装置
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摘要
PROBLEM TO BE SOLVED: To solve a problem that it has been difficult to increase an amount of ion and ozone generation by enhancing discharging efficiency while suppressing the sticking of a nitrate salt and NOx to the surface of a protecting layer.;SOLUTION: The discharge element has a protective layer having a first region and a second region of different heights from an insulating substrate up to an upper surface and the second region is arranged to pinch the first region in a plan view, and the first region has a smaller thickness on a discharge electrode than the second region and the deposition of nitrate and NOx on the protective layer surface can be prevented and the discharge efficiency is enhanced and a large volume of ion and ozone can be generated.;COPYRIGHT: (C)2008,JPO&INPIT
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