Discharge device, the discharge module using the discharge element, and the ozone generator and an ion generating apparatus using the discharge module

摘要

PROBLEM TO BE SOLVED: To solve a problem that it has been difficult to increase an amount of ion and ozone generation by enhancing discharging efficiency while suppressing the sticking of a nitrate salt and NOx to the surface of a protecting layer.;SOLUTION: The discharge element has a protective layer having a first region and a second region of different heights from an insulating substrate up to an upper surface and the second region is arranged to pinch the first region in a plan view, and the first region has a smaller thickness on a discharge electrode than the second region and the deposition of nitrate and NOx on the protective layer surface can be prevented and the discharge efficiency is enhanced and a large volume of ion and ozone can be generated.;COPYRIGHT: (C)2008,JPO&INPIT