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PIEZOELECTRIC THIN-FILM ELEMENT, LIQUID DISCHARGE HEAD, HEAD MODULE, LIQUID DISCHARGE DEVICE, LIQUID DISCHARGE APPARATUS, AND METHOD FOR MANUFACTURING PIEZOELECTRIC THIN-FILM ELEMENT
PIEZOELECTRIC THIN-FILM ELEMENT, LIQUID DISCHARGE HEAD, HEAD MODULE, LIQUID DISCHARGE DEVICE, LIQUID DISCHARGE APPARATUS, AND METHOD FOR MANUFACTURING PIEZOELECTRIC THIN-FILM ELEMENT
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机译:压电薄膜元件,液体排放头,喷头模块,液体排放装置,液体排放装置以及制造压电薄膜元件的方法
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摘要
A piezoelectric thin-film element includes a diaphragm plate on a substrate; a lower electrode on the diaphragm plate; a piezoelectric film on the lower electrode, the piezoelectric film containing Pb; and an upper electrode on the piezoelectric film. The diaphragm plate is a laminate in which a silicon oxide layer, a silicon nitride layer, and an amorphous layer containing a metal oxide to trap Pb of the piezoelectric film are laminated in turn on the substrate. The amorphous layer has a thickness of preventing Pb of the piezoelectric film from reaching the silicon nitride layer.
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