When production manner of the alumina membrane of die crystalline structure entity and the production mannered null substrate of the lamination

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an alumina film comprised mainly of alpha crystalline structure capable of depositing the alumina film comprised mainly of alpha crystalline structure of excellent heat resistance on a substrate at relatively low temperature without considering the type of the substrate.;SOLUTION: When depositing an alumina film comprised mainly of alpha crystalline structure on a substrate (including a substrate with a film deposited thereon in advance), the surface of the substrate is treated by using ceramic powder comprised mainly of the same crystalline structure as the alpha crystalline structure of alumina.;COPYRIGHT: (C)2005,JPO&NCIPI