Production manner of monocrystal silicon and production manner of the monocrystal silicon wafer, to make monocrystal silicon production breed crystal, the monocrystal silicon ingot and monocrystal

摘要

PROBLEM TO BE SOLVED: To pull a heavy single crystal silicon ingot having a large diameter by removing slip dislocations by the large diameter when the single crystal silicon is grown by pulling a seed crystal in a Czochralski process.;SOLUTION: The single crystal silicon is manufactured by using a seed crystal 1 in which the 110 crystal orientation 10 is inclined by a prescribed angle with respect to the axis direction 9 so that the ridge line direction 8 of the {111} crystal face is inclined with respect to the axis direction 9.;COPYRIGHT: (C)2004,JPO