To the slit width measurement equipment and slit width measuring method

摘要

PROBLEM TO BE SOLVED: To easily and precisely measure the width of a slit inside a slit part, provided for an object to be measured at an appropriate location.;SOLUTION: With a pair of members 20a and 20b separated from each other, in such a way as to increase the slit width, the distance between slit surfaces 26a and 26b and the distance between matching surfaces 27a and 27b are detected by a pair of displacement meters 12a and 12b. The slit width of the slit part 21, partitioned between the slit surfaces 26a and 26b, is computed by jointing the pair of members 20a and 20b in such a way that their matching surfaces 27a and 27b closely adhere to each other on the basis of both the distance between slit surfaces 26a and 26b and the distance between matching surfaces 27a and 27b.;COPYRIGHT: (C)2005,JPO&NCIPI