The vibrating reed formation process which forms multiple tuning fork die vibrating reeds on the wafer making use of the tuning fork die vibrator null photolithography

摘要

PROBLEM TO BE SOLVED: To easily adjust an oscillation frequency even after mounting tuning fork type vibration reeds on a package to form a tuning fork type vibrator and further to easily perform fine adjustment of the oscillation frequency.;SOLUTION: A method for adjusting the oscillation frequency of the tuning fork type vibrator comprises a vibrating reed forming step for using a photolithographic method to form a plurality of vibrating reeds on a wafer; a laser emitting step for making point areas of tuning fork parts of the tuning fork type vibrating reeds irradiated with lasers to splash a portion of the point areas of the tuning fork parts; a film forming step for forming a metal film in the point areas of the tuning fork parts; a mounting step for cutting the plurality of tuning fork type vibrating reeds so as to be divided into individual tuning fork type vibrating reeds and adhering and mounting each of the cut tuning fork type vibrating reeds to/on the package to form the tuning fork type vibrator; and an etching step for using an ion milling method to etch the metal film formed in the point areas of the tuning fork parts. The respective steps are sequentially carried out to make the oscillation frequency of the tuning fork type vibrator coincide with a preset oscillation frequency.;COPYRIGHT: (C)2004,JPO&NCIPI