It is the container for cantilever wet processing which is used for the processing by the fluid of the cantilever of the cantilever tip/chip which is used with the unit for container for cantilever wet processing and includes

摘要

PROBLEM TO BE SOLVED: To provide a cantilever wet processing container used for processing a cantilever by means of a fluid to reduce undesired deformation of the cantilever.;SOLUTION: This cantilever wet processing container 100 comprises a lower lid 110 and an upper lid 140, which can be joined by fitting with a cantilever chip 180 housed therein. The lower lid 110 comprises a recessed part 112 capable of housing the cantilever chip 180 and recessed parts 114 and 116 wideningly extending from the recessed part 112 in directions opposite to each other. The lower lid 110 further comprises three pairs of grooves symmetrically extending from the recessed part 112 and a pair of hollows 127 and 128. The upper lid 140 comprises protrusion parts fittable to grooves 121 and 122 of the lower lid 110, and to the hollows 127 and 128, respectively. The upper lid 140 has a mark 148 for showing the direction of the cantilever chip 180.;COPYRIGHT: (C)2005,JPO&NCIPI