With the system conservation the integrated circuit wafer during conservation system null retaining and shipment of the integrated circuit (IC)

摘要

(57) Abstract Container 11 of integrated circuit wafer 19 offers mechanical impact and the protection from electric charge to the wafer. The wafer is protected mechanically by apex and bottom cushion 21, 23 and side section cushion 25. Apex and the bottom cushion respectively have foaming body 27 inside the enclosure of the membrane or film 29. The enclosure, in order to be able to enter and leave vapor 33, has opening 31. The side section cushion has the elastic projection 41 which protects the edge of the wafer. The side section cushion, is put between flange 38 of the apex cushion and the bottom cushion. The individual wafer is separated from mutual by the thin layer separator 20 which was drawn up with the film. Separator 20 and apex and bottom cushion film 29 of 21 and 23 may be the same type. The film has the 2nd layer 53 which was drawn up with the polymer which does not have the 1st layer 51 which was drawn up with the polymer which includes the dissipation material, or the dissipation material. 1st layer and 2nd layer is connected mutually. Insulating layer, is arranged when it is contacted on circuit side of the wafer. The dissipation material may be carbon. The container has ground stud 73 in the wall. The ground stud contacts with the film inside the container, it is possible to ground outside the container.