首页> 外国专利> MAGNETORESISTIVE SENSOR HAVING A HARD BIAS BUFFER LAYER, SEED LAYER STRUCTURE PROVIDING EXCEPTIONALLY HIGH MAGNETIC ORIENTATION RATIO

MAGNETORESISTIVE SENSOR HAVING A HARD BIAS BUFFER LAYER, SEED LAYER STRUCTURE PROVIDING EXCEPTIONALLY HIGH MAGNETIC ORIENTATION RATIO

机译:具有硬偏置层,种子层结构的磁阻传感器具有超高的磁取向比

摘要

A magnetoresistive sensor having magnetically anisotropic bias layers for biasing the free layer of the sensor. The sensor includes a sensor stack with a pinned layer structure and a free layer structure and having first and second sides. Hard bias structures for biasing the magnetization of the free layer are formed at either side of the sensor stack, and each of the hard bias structure includes a hard magnetic layer that has a magnetic anisotropy to enhance the stability of the biasing. The hard bias layer is formed on a buffer layer and a seed layer, the seed layer being sandwiched between the buffer layer and the hard bias layer. The buffer layer has an anisotropic surface texture that promotes the magnetic anisotropy in the hard bias layer. The buffer layer can be CrMo or Ru or can be a bi-layer including a layer of CrMo with a layer of Ru over the CrMo. The seed layer can be constructed of a material having a BCC structure and is preferably constructed of CrMo.
机译:具有用于向传感器的自由层偏置的磁各向异性偏置层的磁阻传感器。该传感器包括具有钉扎层结构和自由层结构并具有第一侧和第二侧的传感器叠层。用于偏置自由层的磁化的硬偏置结构形成在传感器堆叠的任一侧,并且每个硬偏置结构均包括具有磁各向异性的硬磁层,以增强偏置的稳定性。硬偏置层形成在缓冲层和籽晶层上,籽晶层夹在缓冲层和硬偏置层之间。缓冲层具有各向异性的表面纹理,该各向异性的表面纹理促进了硬偏置层中的磁各向异性。缓冲层可以是CrMo或Ru,或者可以是包括CrMo层和在CrMo之上的Ru层的双层。种子层可以由具有BCC结构的材料构成,并且优选由CrMo构成。

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