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METHOD AND APPARATUS FOR IMPROVED ELLIPSOMETRIC MEASUREMENT OF ULTRATHIN FILMS
METHOD AND APPARATUS FOR IMPROVED ELLIPSOMETRIC MEASUREMENT OF ULTRATHIN FILMS
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机译:改进的超薄薄膜的椭圆法测量的方法和装置
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摘要
A method for implementing ellipsometry for an ultrathin film includes directing a polarized light beam incident upon a sample surface, receiving an initial reflected beam from the sample surface and redirecting the initial reflected beam back upon said sample surface one or more times so as to produce a final reflected beam. The final reflected beam is received through an analyzer and at a detector so as to determine characteristics of the ultrathin film.
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