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Method and apparatus for improved ellipsometric measurement of ultrathin films
Method and apparatus for improved ellipsometric measurement of ultrathin films
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机译:改进的超薄膜椭圆偏振测量的方法和设备
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摘要
A method for implementing ellipsometry for an ultrathin film includes directing a polarized light beam incident upon a sample surface, receiving an initial reflected beam from the sample surface and redirecting the initial reflected beam back upon said sample surface one or more times so as to produce a final reflected beam. The final reflected beam is received through an analyzer and at a detector so as to determine characteristics of the ultrathin film.
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