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Method of measuring landed dot, measuring apparatus for landed dot, liquid droplet ejection apparatus, method of manufacturing electro-optic apparatus, electro-optic apparatus, and electronic apparatus
Method of measuring landed dot, measuring apparatus for landed dot, liquid droplet ejection apparatus, method of manufacturing electro-optic apparatus, electro-optic apparatus, and electronic apparatus
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机译:测量着陆点的方法,用于着陆点的测量设备,液滴喷射设备,制造电光设备的方法,电光设备和电子设备
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摘要
A landed dot measuring method in which a topology measuring apparatus having an interferometer measures topology of a landed dot which is a functional liquid droplet landed on an inspection sheet when an inspection ejection for a functional liquid droplet ejection head is performed including: inspection-ejecting in which multiple ejection nozzles of a functional liquid droplet ejection head inspection-eject one by one at a time interval while the functional liquid droplet ejection head is moved in a main scanning direction relatively with respect to the inspection sheet and; and measuring in which respective topologies of multiple landed dots are measured while the topology measuring apparatus follows the functional liquid droplet ejection head and moves in the main scanning direction at a same speed as the functional liquid droplet ejection head relatively with respect to the inspection sheet.
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